Contracted Manufacture

• As a general maker of optical products, Sigma Koki offers an integrated manufacturing system, from the stages of optical, mechanical, electrical, and software design to fabrication, assembly, and product inspection.
• Focusing not just on standard products but also on custom products built to meet the specific needs of our customers, Sigma Koki draws on a long tradition of supplying custom-specification products.
• Of all the countless custom products delivered, a handful are described below.
• Please note that cutting-edge products are omitted, due to the confidential nature of products under development.

• High speed lithography without mask by adopting the sub-micron laser spot.
• Light source : fs laser [second, third and fourth harmonic wave selectable]
• Stages : non-contact air bearing stage or high speed linear motor stage selectable
• Optical observation system: coaxial optical unit monitoring for process condition.
• Auto focus : High speed and fine beam scanning system.
• Direct laser processing using DXF file, which can be generated by most CAD system.
• Three-dimensional deep cutting, XY axis’ repeatable processing.
• High speed scanning processing in visible range size.
• Applicable range for 6 inches to 300mm wafer.(applicable for longer size)
  

Principal Use

• Laser groove-cutting on glass for FPD
• Direct laser lithography of wire patterning
• Optical-waveguide fabrication
• Ultra fine oscillation adjustment for crystal
• Laser drilling on glass
• Fine adjustment for thin film resistor
• Repairing
  

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• Multi-processing systems equipped with DUV laser oscillated wavelength, 266nm.
• Rapid processing with galvanometer scanning and windows compliant software.
• Linear motor drive system.
• Air bearing reduced intermittent motion.
• High precision with granite table.
• Observation and positioning of minute processing point available.
• Wide variety of application software for Windows.
• Can be input system, which incorporates a wide range of SIGMA KOKI’s parts.
• Deep UV enables processing on a large variety of materials.

Processable Materials

Principal Use

• Glass
• Plastic
• Ceramic
• Metal
• Other materials which are difficult to process

• Marking
• Cutting
• Exposure
• Drilling
• Scribing
• Trimming

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• SIGMA KOKI’s High stability, high quality cooled solid laser [355nm].
• High speed scanning with galvano and fθ scanning, which are the result of many years of experience in designing and manufacturing these products.
• User-friendly operation in view of the worker.
• Wide range scanning with high speed, high precision air slider.
• Laser : selectable
  

Convenient Function

Principal Use

• Correction for coordinate
• Process-indication by two-touch
• Check function for finishing

• Repair for LCD panel
• Laser processing for medical parts
• Cutting for short-ring
• Resist separation
• Ablation for ITO film
• Laser trimming
• Surface reforming for macromolecule
  

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• Visualization for invisible processing condition.
• High transparent ratio for High power laser.
• Possible to customize for each wave-length laser, such as YAG, Equisima and etc
  (YAG : 1.06μ m, 532nm, 355nm, 266nm)
  (Equisima : 351nm, 308nm, 248nm, 193nm and etc)
• Light view by co-axial incident lighting.
• Possible to customize for usable wave-length and working distance.
• Possible to customize adjustment to fiber for laser.

For use and application

• Optical unit for observation of laser processing for drilling
  (Print circuit board / laminated circuit board)
• Optical unit for laser abration
• Optical unit for observation of laser marker
• Other optical unit for observation of laser processing

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Combine various units to assemble the laser scanning system best suited to your needs.

System configuration

• Scanner (galvano scanner, polygon scanner, resonant scanner)
• Scan lens (Fθ lens, arcsine lens)
• Various mirrors for scanners
• Drivers
• Control software
• Chassis

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Beam homogenizers are optical units that eliminate luminance irregularities in illumination optical systems, nonuniform power densities of Gaussian distribution lasers, and other similar problems.

Among the many homogenizers available, fly-eye lens homogenizers offer superior homogenization performance and are suitable for use with relatively high-powered lasers.

Used primarily in excimer laser mask optical systems (uniform irradiation on mask).

Specifications for product (available range of production)

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• This shutter unit has unique structure that laser light is reflected by solenoid shutter and absorbed by diffuser.
• Usable as High power laser because of non-heated shutter plate.

Reference Specification

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• This unit allows you to change the fraction transmitted to between 5∼ 90% using angle character for reflection coating.
• Light axis shift accurence below ( 0.1mm ).
• Preparation for both hand-manual and motion control.
• It's possible to maintain stable condition by combining both the electrical variable attenuator and the power monitor (option), even though laser output power from laser oscillator is unstable.

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Specifications for products

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