From Request for Quotation to Product Delivery
How to Use Guide
Important Note
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Optical Hardwares and Manual Positioning Stages
Motorized Stages
Piezo Related Products
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Softwares
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Accuracy verification
The accuracy of a Fine Stage (Piezo Stage) should be inspected periodically with instruments calibrated to international standards and a traceable standard.
Measuring equipment to be used:
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(1) Dynamic Calibrator (HP5529A) manufactured by Agilent Technologies Japan, Ltd.
(2) Two-axis photoelectric autocollimator manufactured by Nikon Corp.
(3) Laser measuring machine (BG10L or BR10A) manufactured by Sony Precision Technology Inc.
(4) Displacement meter (DE12BR or LY51) manufactured by Sony Precision Technology Inc.
(5) Laser displacement meter (LC-2420 or LC-2400) manufactured by Keyence Corp.
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Dynamic Calibrator (HP5529A) manufactured by Agilent Technologies Japan, Ltd.
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Two-axis photoelectric autocollimator manufactured by Nikon Corp.
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Laser measuring machine (BG10L or BR10A) manufactured by Sony Precision Technology Inc.
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| Test item |
Measuring instrument |
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Test item |
Measuring instrument |
| a) Positional repeatability |
(1) (3) (5) |
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f) Positional repeatability |
(2) |
| b) Straightness |
(1) (5) |
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g) Microfeeding characteristics |
(2) |
| c) Pitch |
(2) |
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h) Travel |
(2) (3) (4) |
| d) Travel |
(3) (4) (5) |
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| e) Microfeeding characteristics |
(3) (5) |
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i) Positional repeatability |
(2) |
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j) Travel |
(2) (3) (4) |
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Notes |
- To have stages delivered with measurement results, please indicate accuracy test items and usage conditions (for example, load condition) when ordering motorized stages (fee charged).
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Accuracy testing during stage installation
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The accuracy of the motorized stage itself is assessed at the Sigma Koki factory. Sigma Koki generally does not assess accuracy when the motorized stage combined with other components ? for example, the X, Y, and Z axis. However, please contact us for further information. Under certain conditions, we may be able to perform such accuracy tests. (fee charged)
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Accuracy measurements at customer sites
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Sigma Koki does not perform accuracy testing at customer sites. If required, such tests are performed by the Japan Quality Assurance Organization or other parties. Please contact us for further information. (fee charged)
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SIGMA KOKI CO.,LTD.
Tokyo Head office
5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku, Tokyo, 130-0021, JAPAN
TEL.+81-3-5638-8228 FAX.+81-3-5638-6550 international@sigma-koki.com
Osaka Branch
4-9-28 Nishi-Nakajima, Yodogawa-ku, Osaka 532-0011, JAPAN
TEL.+81-6-6307-4835 FAX.+81-6-6307-4834
Kyushu Sales Office
3-17 Hie-machi, Hakata-ku, Fukuoka 812-0014, JAPAN
TEL. +81-92-481-4300 FAX. +81-92-481-4310
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