XY Piezo Stages Aperture Type

Ultrahigh-precision positioning XY stages for transmission with a 50x50 mm aperture, consisting of a piezo element actuator and a digital sensor for positional feedback. Ideal for samples under microscope requiring fine movement.
Allows use of the conventional three-axis controller for the Sigma Fine Stage (Piezo Stage) FINE-503. The controller is compatible with RS232C, GP-IB, and USB interfaces to enable easy positional control from your PC using measurement and control software such as SGEMCS, SGTERM, or SGSFSX applications.
Ideal for applications such as installation into various microscopes, precision instruments, semiconductor test equipment, precision masking and wafer alignment, scanning interferometers, imaging devices, and biotechnology devices.
XY Piezo Stage Aperture Type with a travel of 150 μm and 200 μm are currently under development.

Specifications

Part Number	SFS-120XY(WA)
Table size	120 x 120mm
Aperture	50 x 50mm
Actuators	Piezo optics
Displacement sensor	Digital Sensors
Travel	100 ± 15%
Resolution (Theoretical open-loop) *	1nm
Resolution (Closed-loop) *	10nm
Straightness : Xy, Xz, Yx, Yz	1μm or less
Positional repeatability	0.1μm or less
Resonant frequency (with 300g weight)	about 100Hz
Load capacity	3kg
Weight	1.2kg
Detail / CAD Download	/
The value is obtained using a controller of FINE-503.

	Notes
Appearance and specifications are subject to change without notice. Contact our Sales Department for more information.

	Example of use

SIGMA KOKI CO.,LTD.
Tokyo Head office
5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku, Tokyo, 130-0021, JAPAN
TEL.+81-3-5638-8228 FAX.+81-3-5638-6550 international@sigma-koki.com
Osaka Branch
4-9-28 Nishi-Nakajima, Yodogawa-ku, Osaka 532-0011, JAPAN
TEL.+81-6-6307-4835 FAX.+81-6-6307-4834
Kyushu Sales Office
3-17 Hie-machi, Hakata-ku, Fukuoka 812-0014, JAPAN
TEL. +81-92-481-4300 FAX. +81-92-481-4310