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Piezo Actuator for Objective Lenses |
SFS |
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- Actuators for objective lenses, equipped with a piezo element actuator and a digital sensor for feedback, allowing smaller, high-speed, high-resolution positioning at a resolution of 1 nm or less (theoretical value) and a travel of 100 μm.
- Allows use of the conventional three-axis FINE-01/503 controller for Sigma Fine (Piezo) Stage System (Piezo Stages). The controller is compatible with RS232C, GP-IB(FINE-503), and USB interfaces to allow easy control of position from a PC using measurement and control software such as SGEMCS, SGTERM, or SGSFSX applications.
- Ideal for applications such as installation into various microscopes, disk inspection devices, automatic focusing systems, biotechnology devices, and semiconductor test equipment.
- Can be mounted to objective lenses manufactured by Olympus, Nikon, and Mitutoyo Corp. simply by replacing the adapter.
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| Part Number |
SFS-OBL-1 |
| Lens adapting |
ø20.32mm |
| Size |
75 x 52.5 x 42mm |
| Actuators |
Piezo optics |
| Displacement sensor |
Digital Sensors |
| Travel |
100 ± 15% |
| Resolution (Theoretical open-loop) * |
1nm |
| Resolution (Closed-loop) * |
10nm |
| Straightness : Xy, Xz, Yx, Yz |
1μm or less |
| Positional repeatability |
0.1μm or less |
| Resonant frequency (with 300g weight) |
about 120Hz |
| Weight |
0.15kg |
| Detail / CAD Download |
 / |
The value is obtained using a controller of FINE-01/503. |
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Notes |
- Appearance and specifications are subject to change without notice. Contact our Sales Department for more information.
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Usage |
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SIGMA KOKI CO.,LTD.
Tokyo Head office
5F, SIGMA KOKI Tokyo Head office 1-19-9, Midori, Sumida-ku, Tokyo, 130-0021, JAPAN
TEL.+81-3-5638-8228 FAX.+81-3-5638-6550 international@sigma-koki.com
Osaka Branch
4-9-28 Nishi-Nakajima, Yodogawa-ku, Osaka 532-0011, JAPAN
TEL.+81-6-6307-4835 FAX.+81-6-6307-4834
Kyushu Sales Office
3-17 Hie-machi, Hakata-ku, Fukuoka 812-0014, JAPAN
TEL. +81-92-481-4300 FAX. +81-92-481-4310
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